发明名称 ELECTRONIC COMPONENT BONDING DEVICE
摘要 PROBLEM TO BE SOLVED: To stably and reliabbly provide an electronic component bonding device, which can make the recovery of electronic components determined as defectives. SOLUTION: In a bonding device for bonding chips 9 on a chip-feeding part 3 on a substrate 7 by a bonding head 16, a chip sensor 22 for inspecting the state of the chips 9 on the way of transferring the chips 9 on the substrate 7 by the head 16 is provided and a box type-shaped chip recovery part 23 for collecting the chips 9 decided a defective by the inspection is provided under the lower part of a bonding head 16 transfer path. The recovery part 23 is provided with a scattering preventive means for preventing the fallen chips from scattering. Thereby, the fallen chips can be recovered surely.
申请公布号 JP2000077439(A) 申请公布日期 2000.03.14
申请号 JP19980244874 申请日期 1998.08.31
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 NAKANISHI TOMOAKI
分类号 H01L21/60;H01L21/52;(IPC1-7):H01L21/52 主分类号 H01L21/60
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