| 摘要 |
PROBLEM TO BE SOLVED: To raise the detection sensitivity for an angular speed by adjusting the frequencies of first and second vibrators for larger amplitude at oscillation of a tuning fork. SOLUTION: On a substrate 2, a tuning fork vibration part 3 comprising a supporting part 4, a first supporting beam 7, a first vibrator 8, a second supporting beam 9, and a second vibrator 10 is provided, while the vibrators 8 and 10 provided with frequency adjusting parts 31 and 32. The frequency adjusting parts 31 and 32 are applied with a bias voltage from outside so that the electrostatic attraction in Y-axis direction is generated at the vibrators 8 and 10. So, the spring constant of the supporting beams 7 and 9 is raised, for raised resonance frequency. The bias voltage is so adjusted that resonance frequencies are close to each other, vibrating the vibrators 8 and 10 at larger amplitude. |
