| 摘要 |
PROBLEM TO BE SOLVED: To inspect a vibrator characteristics like the real one with a single vibrator body, related to an angular speed sensor having the vibrator. SOLUTION: Drive electrodes 11 and 12 provided for driving a vibrator 1, feed-back monitor electrodes 13 and 14 for monitoring the driving condition and self-exciting oscillation, and pat electrodes 17 and 18 for taking out an angular speed output are allowed to contact inspection probes P1-P7 of a resonance frequency equal to or above the oscillation frequency of the drive oscillation, and through the probes P1-P7, the drive of the vibrator 1 or the oscillation state of the detected oscillation is measured as an electric signal for inspecting a vibrator characteristics such as offset voltage. |
