发明名称 SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
摘要 <p>PROBLEM TO BE SOLVED: To provide a semiconductor integrated circuit device which allows such a phase pattern arrangement that no gives rise to contradiction in the Levenson arrangement of a phase shifter, even at a part where an island-like wiring electrode pattern and a linear wiring electrode pattern are present, in the same wiring electrode layer formation mask. SOLUTION: With a plurality of common gate electrodes 2 of a selective transistor provided for the pattern of wiring electrodes 4 and 5 of a plurality of signal lines connected to source/drain of each selective transistor to be a Levenson arrangement, adjoining active regions 1 forming each selective transistor are allocated so as to be alternately deviated in pair units. Thus, the Levenson arrangement is allowed for improved pattern density, resulting in a highly-integrated semiconductor integrated circuit device.</p>
申请公布号 JP2000077531(A) 申请公布日期 2000.03.14
申请号 JP19980248026 申请日期 1998.09.02
申请人 HITACHI LTD 发明人 YAMANAKA TOSHIAKI;SEKIGUCHI TOMONORI;SAKATA TAKESHI;KIMURA SHINICHIRO;MATSUOKA HIDEYUKI
分类号 H01L21/027;G03F1/30;G03F1/68;H01L21/82;(IPC1-7):H01L21/82;G03F1/08 主分类号 H01L21/027
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