| 摘要 |
PROBLEM TO BE SOLVED: To easily provide uniformity of plasma irradiation and the adjustment of intensity by injecting ice slurry formed by mixing ice drops and water on the surface of an electric circuit substrate by using compressed gas, and removing the impurities formed on plating applied on the board. SOLUTION: Ice is manufactured by an ice manufacturing part 1. The iceis crushed into the small particles with an ice-slurry manufacturing part 3, and made to be the ice particles having the intended particle diameter. The particles and water are agitated and mixed, and the ice slurry is manufactured. Then, a material to be cleaned 7, which is a board, is fixed to the specified equipment of a cleaning chamber 9. The ice slurry is compressed and sent into an injecting nozzle 4 by a pump 5 from the ice-slurry manufacturing part 3. The ice slurry is injected toward the surface of the material to be cleaned 7 by the high- pressure gas sent from a high-pressure gas conduit 8. The impurities are formed on the plating applied on the material to be cleaned 7. Thus, the uniformity of the plasma ivadiation and the adjustment of the intensity can be achieved readily.
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