发明名称 Apparatus for steering the arc in a cathodic arc coater
摘要 An apparatus for applying material by cathodic arc vapor deposition to a substrate is provided which includes a vessel, apparatus for maintaining a vacuum in the vessel, a disk-shaped cathode, apparatus for selectively sustaining an arc of electrical energy between the cathode and an anode, and apparatus for steering the arc around the cathode. The arc of electrical energy extending between the cathode and the anode liberates a portion of the cathode which is subsequently deposited on the substrate located inside the vessel.
申请公布号 US6036828(A) 申请公布日期 2000.03.14
申请号 US19970919132 申请日期 1997.08.30
申请人 UNITED TECHNOLOGIES CORPORATION 发明人 BEERS, RUSSELL A.;ROYAL, TYRUS E.
分类号 C23C14/24;H01J37/32;(IPC1-7):C23C14/32 主分类号 C23C14/24
代理机构 代理人
主权项
地址