| 摘要 |
PROBLEM TO BE SOLVED: To make efficient a treatment for separating a laminated substrate. SOLUTION: A first set of substrate supports 414, 420 for pressing and supporting the central part of a laminated substrate 101, a second set of substrate supports 430, 431 for pressing and supporting the annular region at the periphery of the laminated substrate 101, and a nozzle 433 for spraying a jet are provided. In a first step the laminated substrate 101 is supported by the first set of the substrate supports 414, 420 and the peripheral part is separated by the jet, and in a second step the laminated substrate 101 is supported by the second set of the substrate supports 430, 431 and the central part is separated by the jet.
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