DISCHARGE EXCITATION PULSE LASER DEVICE

摘要

PROBLEM TO BE SOLVED: To enable a glow discharge to take plate uniformly in all discharge space so as to generate a laser beam of high output power efficiently. SOLUTION: A discharge excitation pulse laser device is equipped with two high voltage-side conductors 22a and 22b that are nearly equal to each other in inductance Lh and possessed of one terminals electrically connected to peaking capacitors CP at positions each intermediate between the center and edges of an anode electrode 20a and the other terminals connected to a pulse power supply 1 and three low voltage-side conductors 23a to 23c that are nearly equal to each other in inductance Li and possessed of one terminals each connected to the center and ends of a cathode electrode 20b respectively and the other terminals connected to the pulse power supply 1. When energy is given to pre- ionizing electrodes 21 and peaking capacitors CP through the high voltage-side conductors 22a and 22b and the low voltage-side conductors 23a to 23c, feeding paths can be set equal to each other in length and inductance.