| 摘要 |
PROBLEM TO BE SOLVED: To detect a foreign matter in the reverse side from the obverse side of a specimen having light transmittability. SOLUTION: An image-picking-up means 12 is focused on the obverse B1 of a specimen B from an obverse B1 side of the specimen B to be image-picked up, and a foreign matter P in the obverse B1 side of the specimen B is detected based on a picked-up image. The means 12 is focused on the reverse B2 of the specimen B from the obverse B1 side of the specimen B to be image-picked up, and the foreign matter P is detected based on a picked-up image. The foreign matter P in the obverse B1 side of the specimen B detected at the time of the obverse image-picking up of the specimen B is compared with the foreign matter P detected at the time of the reverse image-picking up of the specimen B to detect the foreign matter P in the reverse B2 side of the specimen B.
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