| 摘要 |
PROBLEM TO BE SOLVED: To provide a device without a transient response obtaining sufficient performance and eliminating a reverse flow relating to chemicals of acid, alkali, etc., by constituting the transient response of pressure in the chemicals due to opening/closing of a valve so as to be prevented by elastic deformation of a hollow fiber in a housing. SOLUTION: Many hollow fibers 6 having a fine hole in an outer peripheral surface and having a prescribed length and a fine internal diameter are stored in a housing 8 by fixing left/right end parts thereof. The housing 8, formed in cylindrical shape, is constituted by a lower part communicating with a hollow pipe 2b, left side surface communicating with a hollow pipe 2c, and an upper part communicating with a discharge pipe 10. Since a developing solution is delivered onto a wafer from a nozzle with chemicals passing in the hollow fiber from the fine hole of the hollow fiber outer peripheral surface in the housing, a transient response in the chemicals due to opening/closing of a valve is absorbed by elastic deformation of the hollow fiber, generation of bubbles in the vicinity of the valve is prevented, and a shock generated in the pipe can be relaxed. |
