| 摘要 |
PROBLEM TO BE SOLVED: To enhance versatility and handling convenience together with economic efficiency and space saving by arranging humidifiers and heaters at a plurality of branch passages divided from a rear stage of an air passage downstream side of the cooler, and providing a plurality of processing systems. SOLUTION: The air A in a housing 11 is cooled and dehumidified by cooling units 3a and 3b, respectively, and then supplied to two processing systems Dp downstream side of the unit 3b. That is, the cooled and dehumidified air A is branched to branch passages 2p at a rear stage of an air passage 2, regulated at its humidity by respective humidifiers 5p, and regulated at its temperature by respective heaters 6p. Specifically, the air A supplied to the system Dp of its left half is humidified by the humidifier 5p, heated by the heater 6p, and regulated at its temperature and humidity. The air A supplied to the system of its right half is humidified by the humidifier, heated by the heater and regulated at its temperature and humidity.
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