| 摘要 |
PROBLEM TO BE SOLVED: To avoid contact between a substrate and an irradiating mechanism when a prescribed pattern is recorded by beam irradiation. SOLUTION: A master disk recording device is constituted by having a rotary base 31, with which the substrate 1 coated with resist is rotated, an irradiating mechanism 32, a lifting mechanism 33, with which the irradiating mechanism 32 is movable in a direction perpendicular to the rotary base 31 and in a direction of a plane intersecting the same and a height position displacement mechanism 35, which is interposed between the irradiating mechanism 32 and the lifting mechanism 35. The irradiating mechanism 32 is in contact with the lifting mechanism 33 via a height position displacement mechanism 35. The irradiating mechanism 32 has a structure in which at least a forcusing lens system 36 and a displacement driving mechanism 37 for adjusting a focus are supported with a gas static pressure-pad housing 38. A gas supplying pad 39, which faces to the bottom surface opposite to the substrate, is arranged in the gas static pressure-pad housing 38. A gas is supplied between the irradiating mechanism 32 and the substrate 1 through the gas supplying pad 39.
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