A test layout increases the sample size of electromigration experiments. Through pad sharing, the number of structures tested can be increased, allowing hundreds of identical structures to be tested in a single high temperature oven door.
申请公布号
US6037795(A)
申请公布日期
2000.03.14
申请号
US19970938871
申请日期
1997.09.26
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人
FILIPPI, RONALD G.;POULIN, JAMES J.;RAVIART, ROBERT D.;RODBELL, KENNETH P.;SMITH, RICHARD G.;SULLIVAN, TIMOTHY D.;SWINTON, ALEXANDER J.