发明名称 Multiple device test layout
摘要 A test layout increases the sample size of electromigration experiments. Through pad sharing, the number of structures tested can be increased, allowing hundreds of identical structures to be tested in a single high temperature oven door.
申请公布号 US6037795(A) 申请公布日期 2000.03.14
申请号 US19970938871 申请日期 1997.09.26
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 FILIPPI, RONALD G.;POULIN, JAMES J.;RAVIART, ROBERT D.;RODBELL, KENNETH P.;SMITH, RICHARD G.;SULLIVAN, TIMOTHY D.;SWINTON, ALEXANDER J.
分类号 G01R31/28;H01L23/544;(IPC1-7):G01R31/28 主分类号 G01R31/28
代理机构 代理人
主权项
地址