TEST AND ASSEMBLY EQUIPMENT FOR DRIVING PNEUMATICS OF SEMICONDUCTOR FABRICATING PROCESS WITH IMPROVED SAFETY

摘要

PURPOSE: A test and assembly equipment for driving pneumatics of a semiconductor fabricating process are provided to improve safety by controlling pneumatics in the equipment using an emergency cutoff switch. CONSTITUTION: The equipment comprises a main power mounted upon one end of a body of the equipment, a main air supply line coupled to one end of the equipment, an exhausting line coupled to the main air supply line, a utility air supply line receiving air from the main air supply line and transmitting the air to various driving parts, and a solenoid valve converting air stream to the utility air supply line into air stream to the exhausting line when powered on/off by the main power. The solenoid valve is coupled to the main power, the main air supply line, the exhausting line, and the utility air supply line.