发明名称 PRODUCTION OF SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To make a plane package containable IGBT(insulation gate type bipolar transistor) chips of which turn off destruction resistance quantity is large. SOLUTION: Switching characteristics of each IGBT chip are measured in a switching characteristic measuring process and the IGBT chips within a reference value is selected. Among the selected IGBT chips in a td(off) (delay time in turn off operation) selection process, those with scattering of the td(off) within 10% are selected. The static characteristics of the selected IGBT chips are measured in a static characteristic process and the IGBT chips within a reference value are selected. In a combining process, the IGBT chips having switching characteristics and static characteristics within reference values and the scattering of td(off) within 10% are combined. In an assembling process, a plurality of combined IGBT chips are contained in a plane package.
申请公布号 JP2000074988(A) 申请公布日期 2000.03.14
申请号 JP19980241314 申请日期 1998.08.27
申请人 FUJI ELECTRIC CO LTD 发明人 SAOTOME MASANORI
分类号 G01R31/26;H01L21/66;(IPC1-7):G01R31/26 主分类号 G01R31/26
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