Apparatus for vertical transport of disk-shaped substrates comprises pivotable vertical shafts which are uniformly distributed on a circular and are provided with several flange-like elements with cut-off segments

摘要

The apparatus has a drive unit (17, 18) has at least three vertical, pivotable shafts (3, 4, 5, 6) which are mounted on a base plate and are uniformly distributed on a circular line (K). Each shaft has several disks or collars (20, 20', ...; 21, 21', ...; ...) which are equally spaced and incorporate a flange-like radially extending element (24, 24', ...; 25, 25', ...; ...) with a cut-off segment. Pivot motion of the shafts (and hence the flange-like elements) for successive downward transport of substrates takes place synchronously by means of a connector element (19) and levers (13, 14, 15, 16). The bottom plate (which is provided which a bore whose diameter is greater than the substrate diameter) is connected to a top support ring (8) by means stay bolts (10, 11, 12).