发明名称 METHOD AND DEVICE FOR SURFACE PROCESSING WITH PLASMA AT ATMOSPHERIC PRESSURE
摘要 <p>The invention concerns a method for surface processing with plasma at atmospheric pressure comprising a step which consists in introducing a treating gas in a processing reactor (16), wherein is placed a surface (14) to be processed, between two exciting electrodes (22, 24) and applying a supply voltage to the two electrodes so as to bring about a discharge (12) in the treating gas. The supply voltage is an alternating voltage whereof the amplitude and frequency are adapted to maintain at least part of the treating gas constituents in the excited state and/or the presence of electrons, between two successive alternating supply voltages.</p>
申请公布号 WO0013202(A1) 申请公布日期 2000.03.09
申请号 WO1999FR01932 申请日期 1999.08.04
申请人 L&apos,AIR LIQUIDE, SOCIETE ANONYME POUR L&apos,ETUDE ET L&apos,EXPLOITATION DES PROCEDES GEORGES CLAUDE;SOFTAL ELECTRONIC ERIK BLUMENFELD GMBH &amp, CO. 发明人 GHERARDI, NICOLAS;GOUDA, GAMAL;MASSINES, FRANCOISE;VILLERMET, ALAIN;GAT, ERIC
分类号 H05H1/46;B01J19/08;C23C16/02;H01J37/32;(IPC1-7):H01J37/32 主分类号 H05H1/46
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