Surface acoustic wave resonator for generating Rayleigh waves, has an interdigital transducer disposed within a substrate to generate a shear horizontal wave

摘要

The surface acoustic wave resonator consists of a piezoelectric substrate with an interdigital transducer disposed within the substrate. The resonator is arranged to generate a shear horizontal wave. The interdigital transducer consists of an electrode (11) film made from separate metal films (3a,3b,3c). An Independent claim is included for a method of making a surface acoustic wave resonator.