| 摘要 |
<p>Liquid chemical supply ampules (4), commonly called "bubblers", which are used in semiconductor and fiber optic component production lines are automatically refilled without the need to interrupt operation of the production lines. The bubbler ampules utilize a supply of the liquid chemicals from which the ampules (4) produce a gas stream which is saturated with the chemicals. An individual ampule will be connected by means of a selectively operable series of transfer valves to two separate chemical bulk supply tanks (50, 52). The bulk supply tanks can include one fixed and one replaceable tank; or two replaceable tanks. A chemical supply system is operated by a microprocessor controller (92) which is programmed to be able to selectively manipulate the transfer valves so as to supply the bubbler ampule with chemicals from the fixed bulk tank, and to refill the fixed tank with chemicals from the replaceable tank; or alternatively, the controller can manipulate the transfer valves so as to supply chemicals to the bubbler ampule, first from one replaceable tank, and then from the other replaceable tank. The system is thus able to operate production lines which use either one fixed bulk chemical supply tank and one replaceable bulk chemical supply tank; or two replaceable bulk chemical supply tanks. <IMAGE></p> |
