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发明名称
Verfahren zur Herstellung einer supraleitenden Dünnschicht aus Oxydverbindungen.
摘要
申请公布号
DE69205911(T3)
申请公布日期
2000.03.09
申请号
DE1992605911T
申请日期
1992.07.28
申请人
SUMITOMO ELECTRIC INDUSTRIES, LTD.
发明人
ITOZAKI, HIDEO;NAGAISHI, TATSUOKI;NAKANISHI, HIDENORI;TANAKA, SABURO
分类号
C23C14/34;C23C14/28;C30B29/22;H01B12/06;H01B13/00;H01L21/203;H01L39/24;(IPC1-7):H01L39/24
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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