| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for synthesizing fine powder of carbide-nitride- based complex such as SiC-AlN, etc., controlling the agglomeration of mutual fine powder, having high dispersion uniformity in spite of use of primary fine powder of submicron particle size and to obtain highly uniform complex fine powder suitable as a complex ceramic material producible by the synthesis method. SOLUTION: Fine powder of a carbide such as SiC, etc., having a submicron particle size is supplied to a vertical type tubular reactor 1, floated and transported by a carrier gas. A nitrogen source gas such as NH3, etc., and a metal source gas such as AlCl3, etc., as reaction gases are simultaneously supplied to the reactor. In a high-temperature reaction zone at the top in the tubular reactor 1, individual fine particles of the fine powder of the carbide are coated with a nitride formed by a vapor-phase reaction to produce complex fine powder. Highly uniform mixture fine powder composed of fine powder having 3-10 μm average particle diameter and 1-99 mol.% nitride content ratio obtained by the method is produced. |
