| 摘要 |
PROBLEM TO BE SOLVED: To prevent the generation of film thickness irregularity in a coating width direction by suppressing the deformation of a slot gap caused by the pressure of a coating soln. flowing through the slot. SOLUTION: In a coating apparatus 10, the slot gap (g) held between the slot forming surfaces 15A, 15B of adjacent lips 12, 13 is set to 200μm or less and the flatness of the slot forming surfaces 15A, 15B of the respective lips 12, 13 is set to 4μm or less. In this case, the slot 15 is set so as to satisfy the inequality; Pm/EGW3<0.001 [wherein Pm: the pressure loss (kgf/mm2) of a coating soln. in the slot, E: the Young's modulus (kgf/mm2) of a die, G: slot gap/slot length and W: die thickness/slot length].
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