| 摘要 |
PROBLEM TO BE SOLVED: To surely remove clouding by arranging quartz glass between a pair of metal molds, subjecting the quartz glass to thermal forming and cooling a formed optical element down to room temp., then polishing the formed surface by a brush-like abrasive polisher. SOLUTION: A quartz fly-eye lens 4 obtd. by forming a quartz glass material is clouded in its surface and the necessary optical characteristics are not obtainable therewith. The clouding is, thereupon, removed by using a device described below. The quartz fly-eye lens 4 is mounted on a stage 7 and a brush-like abrasive polisher 6 is mounted at an upper shaft 8. The pressure of the polisher 6 on the lens 4 is regulated by a load 11. In addition, the polisher 6 is made movable in a lateral direction by a parallel drive shaft 10. The upper shaft 8 is lowered to press the polisher 6 to the lens 4 by the load of about 150 kg and while abrasives are supplied by a nozzle 12, rotation of about 50 rpm is applied to a lower shaft 9 and the polisher 6 is oscillated by the parallel drive shaft 10, by which the polishing is executed.
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