发明名称 Metal contact structure in semiconductor device
摘要 A structure of metal contact portion of a semiconductor device, includes a semiconductor substrate having an impurity doped junction therein, an insulating layer pattern formed on the semiconductor substrate having a contact hole through the insulating layer pattern to expose the doped junction, a conductive projection formed directly on a portion of the doped junction, and a metal layer formed on opposite sides of the conductive projection and contacting the doped junction and the conductive projection, whereby a contact area for the doped junction is increased.
申请公布号 US6034435(A) 申请公布日期 2000.03.07
申请号 US19980163570 申请日期 1998.09.30
申请人 LG SEMICON CO., LTD. 发明人 KIM, HYUN SOOK
分类号 H01L23/522;H01L21/28;H01L21/768;(IPC1-7):H01L23/532 主分类号 H01L23/522
代理机构 代理人
主权项
地址