发明名称 Optical member inspection apparatus
摘要 An optical member inspection apparatus is disclosed. A light shielding plate functions to cast a shadow region so that a line sensor receives an image producing a particular defined image data output, generally speaking a dark image representing an absence of light from an illuminator. When an inspection target optical member is inserted in the light path to intersect that shadow region, the line sensor produces the same image data in the event that there is no defect in the optical member. However, a defect in the optical member will enable light from outside that shadow region to be diffused to impinge on the line sensor thereby producing a change in the image data output. Evaluation of the change in the image data output can provide an indication of the degree of defectiveness.
申请公布号 US6034766(A) 申请公布日期 2000.03.07
申请号 US19980035055 申请日期 1998.03.05
申请人 ASAHI KOGAKU KOGYO KABUSHIKI KAISHA 发明人 SUGIURA, MASAYUKI;YAMAMOTO, KIYOSHI;NAKANISHI, TAICHI
分类号 G01M11/02;G01N21/896;G01N21/958;(IPC1-7):G01N21/00;G01B9/00 主分类号 G01M11/02
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