| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and an apparatus for slitting an outer periphery of cylindrical ceramics with good dimensional accuracy from several microns to submicron order and good slit pitch accuracy. SOLUTION: The apparatus for slitting cylindrical ceramics comprises a rotating unit having a support side chucking member 12 for supporting the ceramics 10, a rotary drive side chucking member 13, and a driving means for rotating the ceramics 10 by giving a rotation to the members 12, 13, and a slicer unit having a grinding stone 15 and an air spindle for rotating the stone 15 with a feeding accuracy of a submicron order. In this case, the outer periphery of the ceramics 10 is machined by the stone 15 of the slicer unit.
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