| 发明名称 |
Apparatus and method for surface treatment |
| 摘要 |
Front and reverse surfaces of a workpiece are treated with plasma simultaneously while the workpiece is arranged between electrodes in such a manner that one of the electrode is opposite to the front surface, and another of the electrodes is opposite to the back surface, and a voltage supplied to each of the electrodes is changed frequently.
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| 申请公布号 |
US6033586(A) |
申请公布日期 |
2000.03.07 |
| 申请号 |
US19970890828 |
申请日期 |
1997.07.10 |
| 申请人 |
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. |
发明人 |
MORISAKO, ISAMU |
| 分类号 |
H05H1/46;C23C14/40;C23F4/00;H01J37/32;H01L21/203;H01L21/302;H01L21/304;H01L21/3065;(IPC1-7):H05H1/00 |
主分类号 |
H05H1/46 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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