System and method for delivery of a vapor phase product to a point of use

摘要

Provided are a novel system and method for delivery of a vapor phase product to a point of use, as well as a novel on-site chemical distribution system and method. The system for delivery of a vapor phase product includes a storage vessel containing a liquid chemical under its own vapor pressure, a column connected to receive the chemical in liquified state from the storage vessel, wherein the chemical is fractionated into a contaminated liquid heavy fraction and a purified light vapor fraction and a conduit connected to the column for removing the purified light vapor fraction therefrom. The system is connected to the point of use for introducing the purified vapor fraction thereto. Particular applicability is found in semiconductor manufacturing in the delivery of electronics specialty gases to one or more semiconductor processing tools.