| 摘要 |
PURPOSE: A wafer horizontal retainer is provided to improve an yield of wafer, a durability of equipment, a rate of operation and reduce time and cost of maintenance. CONSTITUTION: The wafer horizontal retainer comprises a pad, a upper coupling, a lower coupling, a spring member and a combiner. In the wafer horizontal retainer, a wafer is placed on the pad in a processing chamber and the upper coupling combines the pad. The lower coupling combines a supporting block which is placed to bottom side of pad. The spring member is set between the upper coupling and the lower coupling. The combiner combines the spring member to the upper coupling and the lower coupling.
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