SEMICONDUCTOR DEVICE WITH ALIGN KEY

摘要

PURPOSE: A semiconductor device with align key is provided to reduce a loss time for measurement of align degree and easily analysis an align degree for plurality of succeeding align keys using a plurality of succeeding align keys inside/outside of a specific align key. CONSTITUTION: The semiconductor device with align key comprises a first align key, and a group of align key with overlapped succeeding align keys. In the semiconductor device with align key, the first align key is formed on a scribe line by a selected photo etching process in a plurality of photo etching process. The group of align key with overlapped succeeding align keys are formed around the first align key by a selected succeeding photo etching process in the plurality of photo etching process.