ROBOT BLADE FOR TRANSFERRING A WAFER

摘要

PURPOSE: A robot blade for transferring a wafer is provided to prevent a distortion of a flat zone in loading a wafer. CONSTITUTION: The robot blade comprises: a board connected to a robot arm which operates according to a program established beforehand; a rear shoe and a front shoe forming a pocket on the board to load the wafer; a sensor established on the board for sensing a loading state of the wafer; and a control projection established in a central region of the rear shoe to lead the flat zone of the wafer which will be loaded to the pocket so that the flat zone can not be distorted.