SEMICONDUCTOR ACCELATOR SENSOR PRODUCTION TO SOLVE UNDERCUTTING OF MASS BY KALIUM HYDROXIDE

摘要

PURPOSE: Semiconductor accelerator sensor is comprised of a frame, a mass, a beam, a piezo-resistive element and a metal layer. The mass changes acceleration from outside to power and delivers the power to the beam. Constructing the mass symmetrically is very important in reliability of the sensor. This invention is provided to solve the problem by designing the mask layout applying to the offset of the crystal surface a kalium hydroxide solution. CONSTITUTION: As the etching rate of Kalium hydroxide solution to the silicon crystal surface is different, we use the mask (40a) that has Ta applying offset to the difference of the etching rate of the silicon crystal surface. It compensates the undercut of the mass by Kalium hydroxide solution.