CASSETTE STAGE PANEL

摘要

PURPOSE: A cassette stage panel is provided to reduce disassembling area of cassette stage panel processing of task while an air cylinder or a down filter is broken and suppress a generating particle for repair. CONSTITUTION: The cassette stage panel comprise a plurality of cassette stages and a plurality of air cylinders. The cassette stage panel covers the plurality of air cylinders to move the cassette stage with carrier in forward/back direction. The cassette stage panel is separately installed to the plurality of cassette stages in respectively. The cassette stage panel is separately installed to cover one of air cylinder.