STABILIZER OF SEMICONDUCTOR FABRICATION EQUIPMENT

摘要

PURPOSE: A stabilizer of semiconductor fabrication equipment is provided to meet over-heat of circuit breaker or outlet and cut over-load of equipment detecting heat of circuit breaker or outlet and outputting an alarm message or an interrupt signal of equipment. CONSTITUTION: The stabilizer of semiconductor fabrication equipment comprises a circuit breaker, a temperature inducing switch and a controller. In the stabilizer of semiconductor fabrication equipment, the circuit breaker supplies an input power to load and cuts the input power for short circuit. The temperature inducing switch is operated by change of temperature in the circuit breaker. The controller controls an output of alarm message and an interrupt signal while the temperature inducing switch is operating, wherein the temperature inducing switch is installed in an output port of circuit breaker.