SPINNER OF PHOTO ETCHING EQUIPMENT FOR MANUFACTURING SEMICONDUCTORS

摘要

PURPOSE: A spinner as a photo etching equipment for manufacturing semiconductor devices is connected to which controls the temperature and the humidity in the spinner, and to a thermo-regulator (16) which controls the temperature of the photoresist. Both the temperature/humidity regulator and the thermo-regulator are used despite the similarity of their functions. The sizes are too big to be installed inside the manufacture line. CONSTITUTION: The preservation device (22) is connected to the spinner (20) to regulate the temperature and humidity in the spinner and to regulate the temperature of photoresist. This device functions as both a temperature/humidity regulator and a thermo-regulator. Thus the size of area required for the installation can be reduced and the device can be installed inside the manufacture line.