ACTUATOR FOR PRESSURE ADJUSTMENT

摘要

PURPOSE: An actuator for pressure adjustment is provided to prolong the service life of the parts by improving the durability of the parts and to reduce installation cost and labor cost by making replacement of the damaged parts easy. CONSTITUTION: The actuator for pressure adjustment comprises; a damper closing the gas tube which feeds the process gas to the process chamber and having a rotary shaft; a solid type gear box(5) having a connecting tube to be combined with the insert tube which covers around the rotary shaft; a driving motor(9) equipped with a driving shaft inserted in the gear box; an intermediate gear engaged with the driving gear and the subsidiary gear respectively; a driving gear(12) connected to the driving shaft in the gear box; a control part delivering a control signal to control the operation of the driving motor(9).