PHOTO REGISTER PROJECTING CONTROLLER FOR SPREADING WAFER AND CONTROL METHOD

摘要

PURPOSE: A photo register is spread evenly on a wafer and decreases in quantity. CONSTITUTION: The controller (3) transmits a motor's (1) drive signal to a servo drive(2), which(2) rotates the motor(1) at a fixed speed. As the motor(1) rotates a wafer(4) revolves at the same speed as the motor(1) and arrives at proper speed after some time. Then the controller (3) transmits the order of projecting photo register to a photo register projecting device (10) and the photo register starts being projected on the wafer (4). After a quantity of the photo register on the wafer (4) is picked up by a camera (6), the image signal is inputted to a vision verifier (5). The vision verifier (5) makes the photo register spread evenly by comparing the fixed standard value with the input value of the quantity of photo register.