发明名称 CAPACITOR FORMING METHOD FOR SEMICONDUCTOR ELEMENT
摘要 PURPOSE: A capacitor forming method for semiconductor element is provided to stably perform process and to secure a yield rate. CONSTITUTION: A method for forming capacitor having a MIM(metal insulator metal) structure is comprises the steps of: a first and a second conductive layer pattern is formed by forming a first contact hole and a second contact hole, simultaneously. A capacitor having the MIM structure is formed on the first conductive layer pattern. Thereby, it is possible to reduce process by reducing a photo process for forming an upper/lower electrode of the capacitor.
申请公布号 KR20000013837(A) 申请公布日期 2000.03.06
申请号 KR19980032931 申请日期 1998.08.13
申请人 SAMSUN ELECTRONIC CO., LTD 发明人 LEE, TAE CHEOL
分类号 H01L27/108;(IPC1-7):H01L27/108 主分类号 H01L27/108
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