发明名称 |
CAPACITOR FORMING METHOD FOR SEMICONDUCTOR ELEMENT |
摘要 |
PURPOSE: A capacitor forming method for semiconductor element is provided to stably perform process and to secure a yield rate. CONSTITUTION: A method for forming capacitor having a MIM(metal insulator metal) structure is comprises the steps of: a first and a second conductive layer pattern is formed by forming a first contact hole and a second contact hole, simultaneously. A capacitor having the MIM structure is formed on the first conductive layer pattern. Thereby, it is possible to reduce process by reducing a photo process for forming an upper/lower electrode of the capacitor.
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申请公布号 |
KR20000013837(A) |
申请公布日期 |
2000.03.06 |
申请号 |
KR19980032931 |
申请日期 |
1998.08.13 |
申请人 |
SAMSUN ELECTRONIC CO., LTD |
发明人 |
LEE, TAE CHEOL |
分类号 |
H01L27/108;(IPC1-7):H01L27/108 |
主分类号 |
H01L27/108 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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