R.F. CONTACT APPARATUS OF CHEMICAL VAPOR DEPOSITION EQUIPMENT

摘要

PURPOSE: The aim is to improve structural drawbacks of assay disk boat and provide R.F. contact apparatus which overcomes an allowable error coming when the boat is installed into load contact in tube. CONSTITUTION: R.F. contact mount connected with assay disk boat contact is magnified long axis oval shape and the length of sleeve connector which wraps the connector connected with the assay disk boat is 1 mm shorter than the length of the connector. The length of the magnified long axis of R.F. contact mount is 27.65 mm.