发明名称 |
SEMICONDUCTOR WAFER ID RECOGNIZING METHOD IN WAFER TEST |
摘要 |
PURPOSE: A semiconductor wafer id recognizing method in wafer test is provided to reduce an error of calculated yield by worker directly registers an ID of wafer. CONSTITUTION: The semiconductor wafer id recognizing method in wafer test comprises the steps of loading a wafer in an inspection equipment; displaying an image of wafer ID with a wafer ID; recognizing the wafer ID; selecting the wafer ID; and progressing a run. The inspection equipment enable to process an optical image processing and probably has an optical character recognition(OCR). The inspection equipment is semi-automatic type which worker directly selects the wafer ID.
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申请公布号 |
KR20000014107(A) |
申请公布日期 |
2000.03.06 |
申请号 |
KR19980033319 |
申请日期 |
1998.08.17 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
AN, BYEONG SEOL;LEE, TAE HO |
分类号 |
H01L21/66;(IPC1-7):H01L21/66 |
主分类号 |
H01L21/66 |
代理机构 |
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地址 |
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