发明名称 SEMICONDUCTOR WAFER ID RECOGNIZING METHOD IN WAFER TEST
摘要 PURPOSE: A semiconductor wafer id recognizing method in wafer test is provided to reduce an error of calculated yield by worker directly registers an ID of wafer. CONSTITUTION: The semiconductor wafer id recognizing method in wafer test comprises the steps of loading a wafer in an inspection equipment; displaying an image of wafer ID with a wafer ID; recognizing the wafer ID; selecting the wafer ID; and progressing a run. The inspection equipment enable to process an optical image processing and probably has an optical character recognition(OCR). The inspection equipment is semi-automatic type which worker directly selects the wafer ID.
申请公布号 KR20000014107(A) 申请公布日期 2000.03.06
申请号 KR19980033319 申请日期 1998.08.17
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 AN, BYEONG SEOL;LEE, TAE HO
分类号 H01L21/66;(IPC1-7):H01L21/66 主分类号 H01L21/66
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