| 摘要 |
PURPOSE: A wafer transfer equipment is provided to prevent a defect of processing and a damage of wafer using optical sensor to determine a miss place of wafer in a installer. CONSTITUTION: The wafer transfer equipment comprises a loader, a unloader, a shuttle, a wafer mounting section, light transceivers/receivers, and a controller. In the wafer transfer equipment, the loader loads an un-processed wafer from a wafer cassette and moves the un-processed wafer to a reaction chamber. The unloader loads moves a processed wafer in the reaction chamber to the other wafer cassette. The shuttle places the un-processed wafer to a chuck in the reaction chamber and moves the processed wafer to the unloader. The light transceivers/receivers are places on the wafer mounting section and detect a miss place of wafer on the wafer mounting section. The controller controls an operation of wafer transfer equipment while the wafer is miss placed on the wafer mounting section.
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