| 摘要 |
PROBLEM TO BE SOLVED: To prevent generation of destruction in a glass membrane by applying compression residual strain to the glass membrane by setting the vapor deposition speed in a glass membrane forming process to a specific low speed range and increasing the breaking strain of the membrane by the quantity of the compression residual strain. SOLUTION: In producing a gas barrier film obtained by forming a glass membrane on a base material film by vapor deposition, the vapor deposition speed in a glass membrane forming process is set to a low speed range of 3-10Å/sec to apply compression residual strain of 0.4-0.6% to the glass membrane and the breaking strain of the membrane is increased by the quantity of the compression residual strain. Otherwise, in producing the gas barrier film obtained by forming the glass membrane on the base material film by vapor deposition, a PET film is used as the base material film and the temp. of this film is raised to a high temp. of about 70-80 deg.C within a range not exceeding a glass transition point and the glass membrane is formed by vapor deposition and the heat shrinkage quantity of the base material film after membrane formation is increased.
|
