| 摘要 |
PROBLEM TO BE SOLVED: To provide an ozone adsorption and desorption device capable of stably desorbing and supplying ozone gas of a fixed concentration at a fixed flow rate without using an diluting gas. SOLUTION: This device is provided with an ozonizer 10 for generating ozone from oxygen, an ozone adsorber 12 for adsorbing the generated ozone to an adsorbent, an ozone discharge line 14 for discharging the ozone desorbed by supplying a carrier gas to the ozone adsorber together with the carrier gas, a temp. controller 18b for controlling the temp. of the ozone adsorber, a pressure controller 18c for controlling the pressure of the ozone adsorber, an ozone concentration controlling device 19 for controlling the ozone concentration and an ozone tank 21 for storing the desorbed ozone and the temp. and/or the pressure are controlled so that the desorbed ozone becomes the fixed concentration by the ozone concentration controlling device to supply the ozone at a fixed flow rate from the ozone tank.
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