| 摘要 |
PROBLEM TO BE SOLVED: To satisfactorily clean a body to be cleaned, to prevent re- contamination and to suppress the rise of the surface temp. of the body to be cleaned by specifying the concn. of ozone in a prescribed space. SOLUTION: Optical parts are cleaned by irradiation with UV in a prescribed space having 10-100 ppm concn. of ozone. A quartz glass substrate is used as a body 6 to be cleaned and the surface is cleaned by wiping with an org. solvent or by ultrasonic cleaning. The substrate 6 is set on a holder 7 in a treatment chamber 1, an oxygen-contg. clean gas is introduced from a clean gas introducing mechanism 4 and low pressure mercury lamps 2 are lighted. At the same time, the exhaust fan of an exhaust mechanism 5 is worked. The concn. of ozone in the chamber 1 is about 50 ppm. Since the oxygen contained in the clean gas is ozonized by light emitted from the lamps 2, the concn. of ozone in the chamber 1 is controlled in accordance with the amt. of the clean gas introduced into the chamber 1, the amt. of oxygen converted into ozone and the amt. of gas discharged.
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