| 摘要 |
PROBLEM TO BE SOLVED: To provide an infrared detector for reducing bending and torsion stress applied to a beam and preventing the beam from being broken. SOLUTION: An infrared detector is provided with a thermopile 15 that is formed of a p-type polysilicon 6 with at least one contact on a beam 16 for connecting a substrate 1 where a thermal separation region 11 is formed on a main surface and an absorption film 4 and at least one contact at a site other than the thermal separation region 11 of the substrate 1 and an n-type polysilicon 7 whose thermal stress differs from that of the p-type polysilicon 6. In the infrared detector, the same p-type polysilicon 6 and the same n-type polysilicon 7 are arranged respectively at the beam 16 so that they are linearly symmetrical for a center line A-A in the longitudinal direction of the beam 16.
|
