| 摘要 |
<p>PROBLEM TO BE SOLVED: To enable a method to highly accurately pattern a pixel electrode and moreover, to prevent a residue from remaining in the case of forming the pixel electrode of a liq. crystal device by using an aluminum(Al) alloy being a reflective material. SOLUTION: In a manufacturing method of a liq. crystal device provided with a pixel electrode 6 formed from an Al alloy, the manufacturing method of the liq. crystal device is provided with a pixel electrode formation process (f) forming the pixel electrodes 6 from the Al alloy on a element substrate 5a' and a residue removing process (g) for removing a residue Z which is a process to be performed after the pixel electrode forming process (f). An electric short circuit generating between an upper and a lower electrode of the liq. crystal device can be prevented by removing the residue Z. The high accurate pixel electrode pattern is formed when the etching of the pixel electrodes 6 is carried out by a dry etching method.</p> |
