发明名称 IMAGE PICKUP ELEMENT, MANUFACTURE OF THE SAME AND ALIGNER
摘要 PROBLEM TO BE SOLVED: To enhance sensitivity of an image pickup element. SOLUTION: A microlens 20 is formed respectively to have a space SP on the array of a plurality of light receiving portions PD formed on a substrate S of a CCD. The light beam indicated by arrow marks p is refracted by the microlens 20 and reaches the light receiving portion PD after advancing through the space SP. Since the space SP is provided between the microlens 20 and light receiving portion PD, thickness of the microlens 20 can be reduced. Thereby, intensity attenuation when the light passes through the microlens 20 can be reduced, and the sensitivity of image pickup element is increased.
申请公布号 JP2000068491(A) 申请公布日期 2000.03.03
申请号 JP19980237320 申请日期 1998.08.24
申请人 NIKON CORP 发明人 SUZUKI JUNJI
分类号 G03F9/00;H01L21/027;H01L27/14;H01L31/02;(IPC1-7):H01L27/14 主分类号 G03F9/00
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