| 摘要 |
PROBLEM TO BE SOLVED: To enable a probe to be highly accurately positioned by forming a probe array provided with plural pieces of position detecting probes which operate relative to a recording medium, and changing the relative angles between the probe array and the recording medium within the plane parallel to the recording medium surface, thereby changing the apparent spacings of plural pieces of the position detecting probes. SOLUTION: A probe array 107 consisting of the five probes integrally formed at 100μm intervals is mounted at the mechanism. Scanning is rectilinearly executed in a forward direction of (x) over a length 110μm by the probe array 107 and voltage pulses are impressed at 7 nm intervals by using the respective probes, by which the five positioning markers 106 over a length 110μm in the (x) direction are formed. The probe array 107 is returned to its home position and the recording medium is subjected to 0.009 rad rotation in a forward direction ofθaround the probe tips of the probes 101 within the plane parallel with the surface of the recording medium, by which the spacings in the (y) direction of the adjacent probes are made apparently smaller by 4 nm and the positioning is executed in this state.
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