| 摘要 |
PROBLEM TO BE SOLVED: To accurately perform positioning, and to miniaturize a device by carrying out three-axis control in the directions of X, Y, andθaxes, and at the same time by supporting a slider part by compressed air. SOLUTION: When a power supply is turned on, a known current is allowed to flow to each coil of an X-axis motor 34, and a slider part 31 is positioned at a reference position. When the slider part 31 is moved in X- and Y-axis directions from the reference position, a two-dimensional position is detected by X-axis sensors 39 and 40 and a Y-axis sensor 38 according to an incremental system. When the bends of mirrors 36 and 37 of X and Y axes do not affect position detection, no correction means 44 and 45 are provided. At this time, the same command position is given to X-axis control parts 42 and 43, thus positioning the slider part 31 at an equal X-axis position by X-axis motors 34 and 35 according to the feedback control of the X-axis control parts 42 and 43, and hence eliminating the yawing of the slider part 31 for achieving accurate positioning.
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