| 摘要 |
PROBLEM TO BE SOLVED: To provide a microlens which has the wide range of selecting lens materials and high dimensional accuracy, a microlens array and a method of manufacturing it. SOLUTION: A process for manufacturing a microlens 10 is composed of three processes. In a 1st process, a concave part 23 is formed on one surface of a silicon substrate 17. In a 2nd process, this concave part 23 is filled with quarts glass 25 for forming the microlens 10. In a 3rd process, a 2nd concave part is formed on the other surface of the side opposite to the surface on which the concave part 23 is formed, the microlens 10 is exposed, and also, an optical path groove 33 is formed for manufacturing a seat 33 provided with the microlens 10.
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